Microwave characterization of intrinsically tunable FBARs
Paper in proceedings, 2012

Unlike the traditional piezoelectric film (AlN, ZnO etc.) based FBARs, the experimental characterization of the tunable ferroelectric FBARs typically start with low frequency DC measurements. In this work wide band microwave measurements are used to generate DC dependent analytic approximations for the parameters of the BVD model. Mason's model and curve fitting procedure is used to extract the DC bias dependent acousto-electric material parameters of the ferroelectric films.

FBAR

Microwave measurement

BVD model

Mason model

BAW

Acoustic resonator

Author

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

IEEE MTT-S International Microwave Symposium Digest

0149645X (ISSN)

6258383

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/MWSYM.2012.6258383

ISBN

978-146731087-1

More information

Created

10/6/2017