Book chapter, 2012
This chapter provides an overview of compliant substrate, its theoretical concept, and practical implementation methods. The concept was originally proposed to offer a versatile technology beyond the limitation of lattice mismatch that has been encountered in most heterostructures. Different fabrication schemes to prepare compliant substrates in various materials are reviewed and assessed. Although there have been plenty of evidence showing reduction of threading dislocations (TDs) using a compliant substrate, its physical origin is still under debate.