Compliant Substrate
Book chapter, 2012

This chapter provides an overview of compliant substrate, its theoretical concept, and practical implementation methods. The concept was originally proposed to offer a versatile technology beyond the limitation of lattice mismatch that has been encountered in most heterostructures. Different fabrication schemes to prepare compliant substrates in various materials are reviewed and assessed. Although there have been plenty of evidence showing reduction of threading dislocations (TDs) using a compliant substrate, its physical origin is still under debate.

Author

Shu Min Wang

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Lattice Engineering Technology and Applications

63-97

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Materials Science

Subject Categories

Materials Engineering

Nano Technology

DOI

10.4032/9789814364256

ISBN

978-981-4316-29-3

More information

Created

10/8/2017