Intrinsically tunable 0.67 BiFeO3-0.33 BaTiO3 thin film bulk acoustic wave resonators
Journal article, 2012
Intrinsically tunable 0.67BiFeO3-0.33 BaTiO3(BF–BT) thin film bulk acoustic wave resonators
with record high tunability of 4.4% and effective electromechanical coupling coefficient of 10%
are fabricated and analyzed. The analysis, based on the theory of the dc field induced piezoelectric
effect with the mechanical loading by the electrodes taken into account, reveals that the enhanced
parameters are associated with the inherently high BF–BT electrostriction coefficient, which is
found to be 5.9x1010 m/F. The Q-factor of the BF–BT resonators is up to 220 at 4.1 GHz
and is limited mainly by acoustic wave scattering at reflection from a relatively rough top interface.
Ferroelecric
microwave film acoustic resonator
tunable FBAR
multiferroic
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Norayr Martirosyan
State Engineering University of Armenia
Markus Löffler
Chalmers, Applied Physics, Microscopy and Microanalysis
Chalmers, Applied Physics, Eva Olsson Group
Eva Olsson
Chalmers, Applied Physics, Eva Olsson Group
Chalmers, Applied Physics, Microscopy and Microanalysis
Applied Physics Letters
0003-6951 (ISSN) 1077-3118 (eISSN)
Vol. 101 23 232903-232903-5- 232903Switchable and tunable composite film bulk acoustic wave resonators (CompFBAR)
Swedish Research Council (VR) (2011-4203), 2012-01-01 -- 2014-12-31.
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DOI
10.1063/1.4769346