Epitaxial growth, processing and characterisation of III-V semiconductor micro- and nanostructures
Licentiate thesis, 1997

micromapping

MBE

dry etching

III-V semiconductor

processing

alternative precursor

SEM

photoluminescence

quantum wire

self-narrowing etching

wet chemical etching

MOVPE

Author

Otto Zsebök

Department of Microelectronics and Nanoscience

Subject Categories

Nano Technology

ISBN

992-473289-8

More information

Created

10/7/2017