Growth of metamorphic InGaP layers on GaAs substrates
Journal article, 2013

We report on the growth of InGaP metamorphic layer by gas source molecular-beam epitaxy. After optimization of the growth temperatures of the compositionally graded InGaP layer and the indium content in the top metamorphic InGaP layer, almost fully relaxed metamorphic layer was obtained with surface roughness of only about 2.17 nm. Strong photoluminescence signals were measured from both InGaAs quantum well and InAs quantum dots embedded in the metamorphic layer, indicating that the top metamorphic layer had low density of threading dislocations. (c) 2013 Elsevier B.V. All rights reserved.

Molecular beam epitaxy


Semiconducting III-V



molecular-beam epitaxy



J. Y. Yan

Chinese Academy of Sciences

Q. Gong

Chinese Academy of Sciences

L. Yue

Chinese Academy of Sciences

Q. B. Liu

Chinese Academy of Sciences

R. H. Cheng

Qufu Normal University

C. F. Cao

Chinese Academy of Sciences

Y. Wang

Chinese Academy of Sciences

Shu Min Wang

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Journal of Crystal Growth

0022-0248 (ISSN)

Vol. 378 141-144

Subject Categories

Physical Sciences



More information

Latest update