Component for electromagnetic waves and a method for manufacturing the same
Patent, 2007

The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.


Leif Bergstedt

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology

Marika Gustafsson

Telefonaktiebolaget LM Ericsson



Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

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