Loss balance in tunable ferroelectric FBARs
Paper in proceeding, 2013

Distinguishing between different loss mechanisms and their distribution between different parts of the Film Bulk Acoustic Wave Resonators (FBAR) is an issue. In this work a scaling rule (based on the analysis of the loss mechanisms) is proposed for initial specification of the losses in different structural components of the tunable FBARs. Simple ADS based calibration procedure is then applied allowing for correction of these losses and identifying the lossiest component. It is shown, in the provided example that the losses due to scattering at the roughness of the top Al electrode is dominating. Polishing of Al is proposed as a possible way of scattering losses reduction.

ferroelectric

Q-factor

loss acoustic

tunable FBAR

scattering loss

Author

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

43rd European Microwave Conference, EuMC 2013 - Held as Part of the 16th European Microwave Week, EuMW 2013, Nuremberg, Germany, 7-10 October 2013

1343-1346
978-287487031-6 (ISBN)

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

ISBN

978-287487031-6

More information

Created

10/6/2017