A miniaturized optical gas-composition sensor with integrated sample chamber
Journal article, 2016

A robust and highly miniaturized optical gas sensor based on optical absorption spectroscopy is presented. By using the resonator cavity of a linear variable optical filter (LVOF) also as a gas chamber, a compact and robust optical sensor is achieved. The device operates at the 15th order in 3.2–3.4 μm wavelength range for distinguishing hydrocarbons. The physical cavity length at the μm-level is translated into an effective optical absorption path length at the mm-level by the use of highly reflective (R > 98%) Bragg mirrors. The optical design using the Fizeau interferometer approach is described. Moreover, the CMOS-compatible fabrication method is explained. In addition to the wideband and single wavelength filter characterization, absorption of methane in the LVOF cavity is demonstrated at 3392 nm and 3416.60 nm wavelengths.


Gas sensor

Fabry-Perot interferometer

Fizeau interferometer

Linear variable optical filter



N.P. Ayerden

Delft University of Technology

M. Ghaderi

Delft University of Technology

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems

Ger de Graaf

Delft University of Technology

Reinoud F. Wolffenbuttel

Delft University of Technology

Sensors and Actuators, B: Chemical

0925-4005 (ISSN)

Vol. 236 29 917-925

Areas of Advance

Nanoscience and Nanotechnology



Subject Categories

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering


Nanofabrication Laboratory



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