COMSOL modeling of SAW Resonators

Paper in proceeding, 2016

Here we demonstrate some generic 2D and 3D routines for SAW analysis employing the commercial COMSOL Multiphysics platform for finite element analysis (FEA). More specifically, we consider the analysis and optimization of high performance LSAW resonators for RF filters. The LSAW nature - being well studied and sufficiently complicated - is chosen as a suitable example for analysis and the results are compared to state-of-the-art knowledge. We found very good agreement between the results of the analytical scheme proposed here and the state-of-art findings. Finally, we demonstrate a TC-SAW piston-mode device simulated using SiO2/128 degrees Y-X LiNbO3.