A highly miniaturized NDIR methane sensor
Paper in proceedings, 2016

The increasing demand for handheld systems for absorption spectroscopy has triggered the development of microspectrometers at various wavelength ranges. Several MEMS implementations of the light source, interferometer/optical filter, and detector have already been reported in the literature. However, the size of microspectrometers is still limited by the required absorption path length in the sample gas cell. This paper presents a compact MEMS linear-variable optical filter (LVOF) where the resonator cavity of the filter is also used as a sample gas cell to measure the absorption of methane at 3392nm wavelength. The physical resonator cavity length is elongated 62.2-fold, using multiple reflections from highly reflective Bragg mirrors to achieve a sufficiently long effective optical absorption path. Although the LVOF would in principle enable operation as a robust portable microspectrometer, here it is used in a miniaturized NDIR methane sensor for wavelength selection and calibration.

fabry-perot

microspectrometer

spectral range

interferometer

gas sensor

spectrometer

Bragg mirror

cavity

filter

methane

spectroscopy

Optical sensor

mid-IR

Fizeau

mems

Author

N.P. Ayerden

G. De Graaf

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

R. F. Wolffenbuttel

Micro-Optics 2016, Brussels, 4-5 Apr.; (SPIE Proceedings vol. 9888)

0277-786X (ISSN)

Vol. 9888 art. no. UNSP 98880D-

Areas of Advance

Nanoscience and Nanotechnology

Transport

Energy

Subject Categories

Atom and Molecular Physics and Optics

Infrastructure

Nanofabrication Laboratory

DOI

10.1117/12.2225924

ISBN

978-1-5106-0133-8

More information

Latest update

9/21/2018