NbN superconducting nanonetwork fabricated using porous silicon templates and high-resolution electron beam lithography
Journal article, 2017
Superconducting NbN nanonetworks with a very small number of interconnected nanowires, with diameter of the order of 4 nm, are fabricated combining a bottom-up (use of porous silicon nanotemplates) with a top-down technique (high-resolution electron beam lithography). The method is easy to control and allows the fabrication of devices, on a robust support, with electrical properties close to a one-dimensional superconductor that can be used fruitfully for novel applications.
one-dimensional superconductivity
quantum phase slips
porous silicon
electron beam lithography
Author
M. Salvato
University of Rome Tor Vergata
University of Salerno
Reza Baghdadi
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
C. Cirillo
University of Salerno
S. L. Prischepa
National Research Nuclear University
Belarusian State University of Informatics and Radioelectronics
A. L. Dolgiy
Belarusian State University of Informatics and Radioelectronics
V. P. Bondarenko
Belarusian State University of Informatics and Radioelectronics
Floriana Lombardi
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
C. Attanasio
University of Salerno
Nanotechnology
0957-4484 (ISSN) 1361-6528 (eISSN)
Vol. 28 46 465301Subject Categories
Condensed Matter Physics
DOI
10.1088/1361-6528/aa8479