A method to evaluate MEMS bonding
Paper in proceedings, 2006

Author

Farzan Alavian Ghavanini

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Cristina Rusu

Katrin Persson

Sjoerd Hassl

Henrik Rödjegård

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Micro Structure Workshop 2006

Vol. 1 1 47-B3d

Subject Categories

Other Engineering and Technologies not elsewhere specified

More information

Created

10/6/2017