A method to evaluate MEMS bonding
Paper in proceeding, 2006

Author

Farzan Alavian Ghavanini

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Cristina Rusu

Katrin Persson

Sjoerd Hassl

Henrik Rödjegård

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Micro Structure Workshop 2006

Vol. 1 1 47-B3d

Subject Categories (SSIF 2011)

Other Engineering and Technologies not elsewhere specified

More information

Created

10/6/2017

Feedback and support

If you have questions, need help, find a bug or just want to give us feedback you may use this form, or contact us per e-mail research.lib@chalmers.se.

About

Research.chalmers.se contains research information from Chalmers University of Technology, Sweden. It includes information on projects, publications, research funders and collaborations.

More about coverage period and what is publicly available

Privacy and cookies

Accessibility

Citation Style Language
citeproc-js (Frank Bennett)

Links

Chalmers Library
Chalmers Research
Chalmers Student Theses

Chalmers University of Technology

SE-412 96 GOTHENBURG, SWEDEN
PHONE: +46 (0)31-772 10 00
WWW.CHALMERS.SE