Multi-parameter estimation of high-Q silicon rich nitride resonators using optical frequency domain reflectometry
Paper in proceedings, 2018

Many linear and nonlinear optics applications rely on micro-resonators (MRRs) with carefully designed dispersion and coupling rate coefficients. These parameters are however challenging to measure for MRRs based on high-confinement optical waveguides. In this paper, we report on the use of optical frequency domain reflectometry (OFDR) for the measurement of group velocity dispersion (GVD), coupling coefficients and round-Trip loss, in high-Q (Q i ∼ 0.3 × 10 6 ) silicon-rich nitride MRRs. This technique allows for retrieving the GVD coefficients, intrinsic losses and coupling coefficients for each transverse mode in the resonator, thus providing very valuable feed-back information from experiments to the design flow step.

Integrated photonics

Time domain response


Optical metrology


Group velocity dispersion

Frequency comb

High-Q microring resonator


Luis A. Bru

Polytechnic University of Valencia (UPV)

Zhichao Ye

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Daniel Pastor

Polytechnic University of Valencia (UPV)

Pascual Muñoz

Polytechnic University of Valencia (UPV)

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN) 1996756X (eISSN)

Vol. 10535 1053518

Integrated Optics: Devices, Materials, and Technologies XXII 2018
San Francisco, USA,

Subject Categories

Medical Laboratory and Measurements Technologies

Other Physics Topics

Other Electrical Engineering, Electronic Engineering, Information Engineering



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