Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range
Paper in proceedings, 2017


Mohammadamir Ghaderi

Delft University of Technology

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Reinoud F Wolffenbuttel

Delft University of Technology

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Kaohsiung, Taiwan,

Subject Categories

Atom and Molecular Physics and Optics

Other Physics Topics

Other Electrical Engineering, Electronic Engineering, Information Engineering

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4/8/2019 1