Laser-surface nanostructures in carbon coating

Journal article, 2005

In this paper we propose a theoretical basis of a new method of laser ablation lithography (LAL) using coherent laser beams interference patterns. The advantage of our method is the absence of the need to use a mask. In our method the profile of nanostructures surface in carbon coating is produced by an interference laser beam pattern and depends on the following parameters: angle of beams convergence, phase difference, and intensity of the beams, and so forth