Surface nanostructuring by implantation of cluster ions
Journal article, 2004
hillock
cluster-surface collision
crater
cluster ion implantation
Author
Vladimir Popok
Chalmers, Department of Experimental Physics, Atomic Physics
Sergei Prasalovich
University of Gothenburg
Eleanor E B Campbell
University of Gothenburg
Vacuum
Vol. 76 2-3 265-272
Subject Categories
Physical Sciences
Condensed Matter Physics
DOI
10.1016/j.vacuum.2004.07.029