The formation and characterisation of lanthanum oxide based Si/High-k/NiSi gate stacks by electron beam evaporation: An examination of in-situ amorphous silicon capping and NiSi formation
Journal article, 2007
Author
P.K. Hurley
M. Pijolat
K. Cherkaoui
E. O'Connor
D. O'Donnel
M.A. Negara
M.C. Lemme
H.D.B. Gottlob
M Schmidt
K. Stegmaier
U. Schwalke
S. Hall
O Buiu
Olof Engström
Chalmers, Microtechnology and Nanoscience (MC2)
S.B. Newcomb
ECS Transactions
Vol. 11 4 145-
Subject Categories
Other Engineering and Technologies