Quest for an optimal gadolinium silicate gate dielectric stack
Paper in proceeding, 2008
Author
I. Z. Mitrovic
Maria Werner
W.M. Davey
S. Hall
P.R. Chalker
H.D.B. Gottlob
M.C. Lemme
Olof Engström
Chalmers, Applied Physics, Physical Electronics
K. Cherkaoui
P.K. Hurley
39th IEEE Semiconductor Interface Specialists Conference (SISC 2009), December 11-13, 2008,
Subject Categories
Other Engineering and Technologies
Other Engineering and Technologies not elsewhere specified