Self-Cleaning Micro-Windows for In-Tailpipe Optical Exhaust Gas Measurements
Paper in proceedings, 2020

Exhaust gas measurement in the harsh environment of the tailpipe of a combustion engine by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of particulate matter (PM). The considerations are presented for the systematic design of membranes with integrated heaters in SiC-on-Si technology for generating a well-defined lateral temperature profile with peak temperatures above 600 °C. Periodically raising the temperature of the membranes to such a level is demonstrated to keep the surface transparent by oxidation of soot deposits. This paper is about continuous heating of the membrane to a temperature slightly higher than that of the exhaust gas. At such temperatures thermophoretic repulsion of PM allows allows long-term optical measurement in the exhaust without the thermo-mechanical loading by repetitive thermal cycling.

Exhaust gas measurement

Membrane

Optically transparent window

Soot deposition

Optical MEMS

Author

Mohammadamir Ghaderi

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Luke M. Middelburg

Delft University of Technology

David Bilby

Ford Motor Company

Jaco H. Visser

Ford Motor Company

Per Lundgren

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Reinoud F. Wolffenbuttel

Delft University of Technology

IEEE International Symposium on Industrial Electronics

1104-1108 9152437

2020 IEEE 29th International Symposium on Industrial Electronics (ISIE)
Delft, Netherlands,

Subject Categories

Energy Engineering

Manufacturing, Surface and Joining Technology

Other Materials Engineering

DOI

10.1109/ISIE45063.2020.9152437

More information

Latest update

3/8/2021 3