Towards sub-nanometer feature sizes by high-resolution electronbeam litography
Research Project, 2013
– 2020
Description missing.
Participants
Peter Modh (contact)
Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory
Funding
Knut and Alice Wallenberg Foundation
Project ID: 2011-0227
Funding Chalmers participation during 2013–2020
Related Areas of Advance and Infrastructure
Sustainable development
Driving Forces
Nanoscience and Nanotechnology
Areas of Advance
Nanofabrication Laboratory
Infrastructure