Properties of ultra-thin NbN films for membrane-type THz HEB
Paper in proceeding, 2007
Various buffer layers have been investigated in order to improve the crystalline quality of NbN ultra-thin films. The structural properties, the thickness, the surface morphology of 5-10 nm NbN films have been studied by different techniques. Uncertainty on thickness measurements in this range and the relation between NbN film quality and gain bandwidth are discussed in the framework of their use in Hot Electron Bolometers (HEB).
mixer devices
NbN ultra-thin films
Author
B. Guillet
ENSICAEN Ecole Nationale Superieure d'Ingenieurs de Caen
LERMA - Laboratoire d'Etudes du Rayonnement et de la Matiere en Astrophysique et Atmospheres
O. Arthursson
Chalmers
L. Mechin
ENSICAEN Ecole Nationale Superieure d'Ingenieurs de Caen
M. N. Metzner
ENSICAEN Ecole Nationale Superieure d'Ingenieurs de Caen
M. P. Chauvat
ENSICAEN Ecole Nationale Superieure d'Ingenieurs de Caen
P. Ruterana
ENSICAEN Ecole Nationale Superieure d'Ingenieurs de Caen
Vladimir Drakinskiy
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Serguei Cherednichenko
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
R. Lefevre
LERMA - Laboratoire d'Etudes du Rayonnement et de la Matiere en Astrophysique et Atmospheres
Y. Delorme
LERMA - Laboratoire d'Etudes du Rayonnement et de la Matiere en Astrophysique et Atmospheres
J. M. Krieg
LERMA - Laboratoire d'Etudes du Rayonnement et de la Matiere en Astrophysique et Atmospheres
Journal of Low Temperature Physics
0022-2291 (ISSN) 1573-7357 (eISSN)
Vol. 151 1-2 570-574Subject Categories
Physical Sciences
DOI
10.1007/s10909-007-9694-1