A monolithic three-axis SOI-accelerometer with uniform sensitivity
Journal article, 2005
This paper describes design and fabrication of a capacitive three-axis accelerometer. The devices are bulk micromachined from SOI-wafers by DRIE, and are protected by glass encapsulation. The design is optimised to give direction independent resolution and frequency response, i.e. identical properties in all directions.
Author
H. Rödjegård
Imego AB - The Institute of Micro and Nanotechnology
C. Johansson
Cellectricon AB
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2)
G. Andersson
Imego AB - The Institute of Micro and Nanotechnology
Sensors and Actuators, A: Physical
0924-4247 (ISSN)
Vol. 123-124 50-53Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1016/j.sna.2005.02.032