A monolithic three-axis SOI-accelerometer with uniform sensitivity
Artikel i vetenskaplig tidskrift, 2005

This paper describes design and fabrication of a capacitive three-axis accelerometer. The devices are bulk micromachined from SOI-wafers by DRIE, and are protected by glass encapsulation. The design is optimised to give direction independent resolution and frequency response, i.e. identical properties in all directions.

Författare

H. Rödjegård

Imego AB - The Institute of Micro and Nanotechnology

C. Johansson

Cellectricon AB

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2)

G. Andersson

Imego AB - The Institute of Micro and Nanotechnology

Sensors and Actuators, A: Physical

0924-4247 (ISSN)

Vol. 123-124 50-53

Ämneskategorier

Elektroteknik och elektronik

DOI

10.1016/j.sna.2005.02.032

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Senast uppdaterat

2018-09-06