Application of ARXPS for characterisation of SiC/Ni2Si Thin Film Systems
Journal article, 2006

XPS

SiC/Ni2Si

thin film systems

agle-resolved analysis

Author

Sergio Alfonso Garcia Perez

Chalmers, Materials and Manufacturing Technology, Surface and Microstructure Engineering

Lars Nyborg

Chalmers, Materials and Manufacturing Technology, Surface and Microstructure Engineering

Other publications Research

ECASIA 2005, Surface and Interface Analysis special edition

Subject Categories

Materials Engineering

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12/13/2018

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