Surface roughness of GaN and thin AlGaN layers grown by molecular beam epitaxy
Journal article, 2004
Author
Xinju Liu
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Thorvald Andersson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
applied surface science
Vol. 226 331-
Subject Categories
Physical Sciences