Hybrid-mounted micromachined aluminum hotwires for wall shear stress measurements
Journal article, 2005

In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor. © 2005 IEEE.


Sjoerd Haasl

Royal Institute of Technology (KTH)

Dirk Mucha

Fraunhofer-Institut fur Produktionsanlagen und Konstruktionstechnik

Royal Institute of Technology (KTH)

Valery Chernoray

Chalmers, Applied Mechanics

Thorbjörn Ebefors

Silex Microsystems AB

Royal Institute of Technology (KTH)

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Lennart Löfdahl

Chalmers, Applied Mechanics

Göran Stemme

Royal Institute of Technology (KTH)

Journal of Microelectromechanical Systems

1057-7157 (ISSN)

Vol. 14 2 254-260

Subject Categories

Control Engineering



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9/6/2018 1