Hybrid-mounted micromachined aluminum hotwires for wall shear stress measurements
Journal article, 2005
In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor. © 2005 IEEE.
Author
Sjoerd Haasl
Royal Institute of Technology (KTH)
Dirk Mucha
Fraunhofer-Institut fur Produktionsanlagen und Konstruktionstechnik
Royal Institute of Technology (KTH)
Valery Chernoray
Chalmers, Applied Mechanics
Thorbjörn Ebefors
Silex Microsystems AB
Royal Institute of Technology (KTH)
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Lennart Löfdahl
Chalmers, Applied Mechanics
Göran Stemme
Royal Institute of Technology (KTH)
Journal of Microelectromechanical Systems
1057-7157 (ISSN)
Vol. 14 2 254-260Subject Categories
Control Engineering
DOI
10.1109/JMEMS.2004.839029