Hybrid-mounted micromachined aluminum hotwires for wall shear stress measurements
Artikel i vetenskaplig tidskrift, 2005

In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor. © 2005 IEEE.

Författare

Sjoerd Haasl

The Royal Institute of Technology (KTH)

Dirk Mucha

The Royal Institute of Technology (KTH)

Fraunhofer-Institut fur Produktionsanlagen und Konstruktionstechnik

Valery Chernoray

Chalmers, Tillämpad mekanik

Thorbjörn Ebefors

The Royal Institute of Technology (KTH)

Silex Microsystems

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fasta tillståndets elektronik

Lennart Löfdahl

Chalmers, Tillämpad mekanik

Göran Stemme

The Royal Institute of Technology (KTH)

Journal of Microelectromechanical Systems

1057-7157 (ISSN)

Vol. 14 254-260

Ämneskategorier

Reglerteknik

DOI

10.1109/JMEMS.2004.839029