Hybrid-mounted micromachined aluminum hotwires for wall shear stress measurements
Artikel i vetenskaplig tidskrift, 2005

In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor. © 2005 IEEE.

Författare

Sjoerd Haasl

Kungliga Tekniska Högskolan (KTH)

Dirk Mucha

Fraunhofer-Institut fur Produktionsanlagen und Konstruktionstechnik

Kungliga Tekniska Högskolan (KTH)

Valery Chernoray

Chalmers, Tillämpad mekanik

Thorbjörn Ebefors

Silex Microsystems AB

Kungliga Tekniska Högskolan (KTH)

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fasta tillståndets elektronik

Lennart Löfdahl

Chalmers, Tillämpad mekanik

Göran Stemme

Kungliga Tekniska Högskolan (KTH)

Journal of Microelectromechanical Systems

1057-7157 (ISSN)

Vol. 14 2 254-260

Ämneskategorier

Reglerteknik

DOI

10.1109/JMEMS.2004.839029

Mer information

Senast uppdaterat

2018-09-06