Hybrid-mounted micromachined aluminum hotwires for wall shear stress measurements
Artikel i vetenskaplig tidskrift, 2005
In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor. © 2005 IEEE.
Författare
Sjoerd Haasl
Kungliga Tekniska Högskolan (KTH)
Dirk Mucha
Fraunhofer-Institut fur Produktionsanlagen und Konstruktionstechnik
Kungliga Tekniska Högskolan (KTH)
Valery Chernoray
Chalmers, Tillämpad mekanik
Thorbjörn Ebefors
Silex Microsystems AB
Kungliga Tekniska Högskolan (KTH)
Peter Enoksson
Chalmers, Mikroteknologi och nanovetenskap, Fasta tillståndets elektronik
Lennart Löfdahl
Chalmers, Tillämpad mekanik
Göran Stemme
Kungliga Tekniska Högskolan (KTH)
Journal of Microelectromechanical Systems
1057-7157 (ISSN)
Vol. 14 2 254-260Ämneskategorier
Reglerteknik
DOI
10.1109/JMEMS.2004.839029