A monolithic three-axial SOI-accelerometer with uniform sensitivity
Paper in proceeding, 2004
Author
Henrik Rödjegård
Christer Johansson
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Gert Andersson
EUROSENSORS XVIII, Rome, Italy, Sept. 11-13, 2004
Subject Categories
Control Engineering