A monolithic three-axial SOI-accelerometer with uniform sensitivity
Paper in proceedings, 2004

Author

Henrik Rödjegård

Christer Johansson

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Gert Andersson

EUROSENSORS XVIII, Rome, Italy, Sept. 11-13, 2004

Subject Categories

Control Engineering

More information

Created

10/8/2017