Si-integration
TFBAR
Induced piezoelectric effect
FBAR
Acoustic Bragg reflector ferroelectric
Chalmers, Applied Physics, Physical Electronics
Chalmers, Applied Physics, Physical Electronics
Chalmers, Applied Physics, Physical Electronics
Chalmers, Applied Physics, Physical Electronics
41-44
Electrical Engineering, Electronic Engineering, Information Engineering
10.1109/SMIC.2010.5422942
978-142445458-7