pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique
Journal article, 2010
pH sensitive properties of barium strontium titianate (BST) high k thin films as alternative gate material for field-effect capacitive (bio-) chemical sensors based on an electrolyte-insulator semiconductor system have been investigated. The BST films of different composition (Ba0.3Sr0.69TiO3, Ba0.25Sr0.75TiO3 and MG doped Ba0.8Sr0.2Mg0.1Ti0.9O3 were deposited by pulsed laser deposition technique from targets farbicated by self-propagating high-temperatures synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance-voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5-10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.(C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
CHEMICAL SENSORS
TUNABLE
field effect sensor
FIELD-EFFECT TRANSISTORS
OXIDES
FABRICATION
DEVICES
IDENTICAL TRANSDUCER PRINCIPLE
PLD
MEMBRANE
APPLICATIONS
SENSING PROPERTIES
biosensor
barium strontium titanate
ISFET
Author
V. V. Buniatyan
State Engineering University of Armenia
Aachen University of Applied Sciences
M. H. Abouzar
Forschungszentrum Jülich
Aachen University of Applied Sciences
N. W. Martirosyan
State Engineering University of Armenia
J. Schubert
Forschungszentrum Jülich
Spartak Gevorgian
Chalmers, Applied Physics, Physical Electronics
M. J. Schoning
Aachen University of Applied Sciences
Forschungszentrum Jülich
A. Poghossian
Forschungszentrum Jülich
Aachen University of Applied Sciences
Physica Status Solidi (A) Applications and Materials Science
1862-6300 (ISSN) 1862-6319 (eISSN)
Vol. 207 4 824-830Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1002/pssa.200983310