pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique
Artikel i vetenskaplig tidskrift, 2010

pH sensitive properties of barium strontium titianate (BST) high k thin films as alternative gate material for field-effect capacitive (bio-) chemical sensors based on an electrolyte-insulator semiconductor system have been investigated. The BST films of different composition (Ba0.3Sr0.69TiO3, Ba0.25Sr0.75TiO3 and MG doped Ba0.8Sr0.2Mg0.1Ti0.9O3 were deposited by pulsed laser deposition technique from targets farbicated by self-propagating high-temperatures synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance-voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5-10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.(C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

CHEMICAL SENSORS

TUNABLE

field effect sensor

FIELD-EFFECT TRANSISTORS

OXIDES

FABRICATION

DEVICES

IDENTICAL TRANSDUCER PRINCIPLE

PLD

MEMBRANE

APPLICATIONS

SENSING PROPERTIES

biosensor

barium strontium titanate

ISFET

Författare

V. V. Buniatyan

State Engineering University of Armenia

Fachhochschule Aachen

M. H. Abouzar

Forschungszentrum Jülich

Fachhochschule Aachen

N. W. Martirosyan

State Engineering University of Armenia

J. Schubert

Forschungszentrum Jülich

Spartak Gevorgian

Chalmers, Teknisk fysik, Fysikalisk elektronik

M. J. Schoning

Fachhochschule Aachen

Forschungszentrum Jülich

A. Poghossian

Forschungszentrum Jülich

Fachhochschule Aachen

Physica Status Solidi (A) Applications and Materials

1862-6300 (ISSN) 1862-6319 (eISSN)

Vol. 207 4 824-830

Ämneskategorier

Elektroteknik och elektronik

DOI

10.1002/pssa.200983310