Scaling of epitaxial layers in a 70 nm gate length InGaAs-InAlAs-InP HEMT technology
Other conference contribution, 2005
Author
Malin Borg
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Shu Min Wang
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Jan Grahn
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Published in
Proceed. GigaHertz 2005 Conference
p. 155-158
Categorizing
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering