Tunable thin film bulk acoustic wave resonators with improved Q-factor
Journal article, 2010

The tunable solidly mounted Ba0.25Sr0.75TiO3 (BSTO) thin film bulk acoustic wave resonators (TFBARs) with improved Q-factor are fabricated and characterized. The BSTO films are grown by magnetron sputtering at temperature 600 degrees C and extremely low sputter gas pressure 2 mTorr using on-axis configuration. The measured TFBARs Q-factor is more than 250 and mechanical Q-factor is more than 350 at 5 GHz resonance frequency. The improvement in the Q-factor is associated with reduction in the BSTO film grain misorientation. The latter is responsible for generation of shear waves leaking through the Bragg reflector and corresponding acoustic loss. (C) 2010 American Institute of Physics.

baxsr1-xtio3

Author

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Applied Physics Letters

0003-6951 (ISSN) 1077-3118 (eISSN)

Vol. 96 21 Article Number: 212904 - 212904

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Materials Science

Driving Forces

Sustainable development

Roots

Basic sciences

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Condensed Matter Physics

DOI

10.1063/1.3441413

More information

Created

10/7/2017