Tunable thin film bulk acoustic wave resonators with improved Q-factor
Artikel i vetenskaplig tidskrift, 2010
The tunable solidly mounted Ba0.25Sr0.75TiO3 (BSTO) thin film bulk acoustic wave resonators (TFBARs) with improved Q-factor are fabricated and characterized. The BSTO films are grown by magnetron sputtering at temperature 600 degrees C and extremely low sputter gas pressure 2 mTorr using on-axis configuration. The measured TFBARs Q-factor is more than 250 and mechanical Q-factor is more than 350 at 5 GHz resonance frequency. The improvement in the Q-factor is associated with reduction in the BSTO film grain misorientation. The latter is responsible for generation of shear waves leaking through the Bragg reflector and corresponding acoustic loss. (C) 2010 American Institute of Physics.
baxsr1-xtio3
Författare
Andrei Vorobiev
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Spartak Gevorgian
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Applied Physics Letters
0003-6951 (ISSN) 1077-3118 (eISSN)
Vol. 96 21 Article Number: 212904 - 212904Styrkeområden
Informations- och kommunikationsteknik
Nanovetenskap och nanoteknik (SO 2010-2017, EI 2018-)
Materialvetenskap
Drivkrafter
Hållbar utveckling
Fundament
Grundläggande vetenskaper
Ämneskategorier
Elektroteknik och elektronik
Den kondenserade materiens fysik
DOI
10.1063/1.3441413