Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors for microwave/millimeterwave applications
Journal article, 2003
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Pär Rundqvist
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Khaled Khamchane
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Appl. Phys. Lett.
Vol. 83 15 3144-6
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering