Dynamic laser speckle in optical projection lithography: causes, effects on CDU and LER, and possible remedies
Paper in proceedings, 2005

Author

Torbjörn Sandström

Christer Rydberg

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

SPIE Proceedings

Vol. 5754

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017