Dynamic laser speckle in optical projection lithography: causes, effects on CDU and LER, and possible remedies

Torbjörn Sandström; Christer Rydberg; Jörgen Bengtsson

Dynamic laser speckle in optical projection lithography: causes, effects on CDU and LER, and possible remedies
Paper in proceeding, 2005

Author

Torbjörn Sandström

Christer Rydberg

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Other publications Research

SPIE Proceedings

Vol. 5754

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/6/2017

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Dynamic laser speckle in optical projection lithography: causes, effects on CDU and LER, and possible remedies Paper in proceeding, 2005