Electrical properties of low-temperature bonded uni-polar Si/Si junctions
Journal article, 2005
Author
Bahman Raeissi
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Petra Amirfeiz
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Olof Engström
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Proc. 207th ECS-Meeting, Quebec 2005, Semiconductor Wafer Bonding VII
205-
Subject Categories
Condensed Matter Physics