Microsensors for in situ electron microscopy applications
Doctoral thesis, 2010
capacitive read-out
Microsensors
In situ TEM
TEM-AFM
TEM-Nanoindenter
AFM
nanoscale characterisation
MEMS
Nanoindentation
piezoresistive read-out
Author
Alexandra Nafari
Chalmers, Applied Physics, Electronics Material and Systems
A micromachined nanoindentation force sensor
Sensors and Actuators, A: Physical,;Vol. A123-124(2005)p. 44-49
Journal article
Galling related surface properties of powder metallurgical tool steels alloyed with and without nitrogen
Wear,;Vol. 269(2010)p. 229-240
Journal article
MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements
Journal of Micromechanics and Microengineering,;Vol. 20(2010)
Journal article
MEMS Sensor for In Situ TEM Atomic Force Microscopy
Journal of Microelectromechanical Systems,;Vol. 17(2008)p. 328 - 333
Journal article
Boron impurity at the Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices
Journal of Micromechanics and Microengineering,;Vol. 19(2009)p. 6-
Journal article
Calibration methods of force sensors in the micro-Newton range
Journal of Micromechanics and Microengineering,;Vol. 17(2007)p. 2102-7
Journal article
Subject Categories
Materials Engineering
Other Engineering and Technologies
Control Engineering
ISBN
978-91-7385-442-9
Doktorsavhandlingar vid Chalmers tekniska högskola. Ny serie: 3123
Kollektorn (A423) MC2
Opponent: Prof. Peter Böggild