Wafer bonding: A retrospective
Paper in proceeding, 2010
Author
Stefan Bengtsson
Chalmers, Applied Physics, Electronics Material and Systems
ECS Transactions
19386737 (ISSN) 19385862 (eISSN)
Vol. 33 4 429-439978-156677823-7 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1149/1.3483533
ISBN
978-156677823-7