Gate stacks
Book chapter, 2013

AlN buffer layer

GdSiO/LaSiO

MOSFETs

Metal gate

Gate stacks

Author

Olof Engström

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

I. Z. Mitrovic

University of Liverpool

S. Hall

University of Liverpool

Bahman Raeissi

Tyndall National Institute at National University of Ireland, Cork

K. Cherkaoui

Tyndall National Institute at National University of Ireland, Cork

S Monaghan

Tyndall National Institute at National University of Ireland, Cork

H. D. B. Gottlob

Gesellschaft fur Angewandte Mikro- und Optoelektronik mbH

M.C. Lemme

Harvard University

Nanoscale CMOS: Innovative Materials, Modeling and Characterization

23 - 67

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1002/9781118621523.ch2

More information

Latest update

2/9/2022 1