Growth characterization of vertically aligned carbon nanofibers on top of TiN buffer layer for nanoelectromechanical devices
Paper in proceeding, 2010
Titanium nitride
Growth
VACNF
Vertucally aligned carbon nanojiber
Plasma enhanced CVD
Author
Farzan Alavian Ghavanini
Chalmers, Applied Physics, Electronics Material and Systems
Maria Damian
Chalmers, Applied Physics, Electronics Material and Systems
Damon Rafieian
Chalmers, Applied Physics, Electronics Material and Systems
Per Lundgren
Chalmers, Applied Physics, Electronics Material and Systems
Procedia Engineering, 24th Eurosensor 24th Conference Linz, AUSTRIA, SEP 05-08, 2010
1877-7058 (eISSN)
Vol. 5 1115-1118Areas of Advance
Transport
Production
Subject Categories
Other Engineering and Technologies
Physical Sciences
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1016/j.proeng.2010.09.306