Low temperature cofired ceramics for mems bonding
Paper in proceedings, 2010
Author
M. F. Khan
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
Farzan Alavian Ghavanini
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
Cristina Rusu
Sjoerd Haasl
L Löfgren
K Persson
K. Schjolberg-Henriksen
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
Micronano Systems Workshop 2010 (MSW 2010), 4-5 May, 2010, Stockholm, Sweden
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