Low temperature cofired ceramics for mems bonding
Paper in proceeding, 2010
Author
M. F. Khan
Chalmers, Applied Physics, Electronics Material and Systems
Farzan Alavian Ghavanini
Chalmers, Applied Physics, Electronics Material and Systems
Cristina Rusu
Sjoerd Haasl
L Löfgren
K Persson
K. Schjolberg-Henriksen
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
Micronano Systems Workshop 2010 (MSW 2010), 4-5 May, 2010, Stockholm, Sweden
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