Low temperature cofired ceramics for mems bonding
Paper in proceedings, 2010

Author

M. F. Khan

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Farzan Alavian Ghavanini

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Cristina Rusu

Sjoerd Haasl

L Löfgren

K Persson

K. Schjolberg-Henriksen

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Micronano Systems Workshop 2010 (MSW 2010), 4-5 May, 2010, Stockholm, Sweden

Areas of Advance

Transport

Production

Subject Categories

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/8/2017