Microshutters for MEMS-based time-of-flight measurements in space
Paper in proceeding, 2011
This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-of-flight (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.
Author
K. Brinkfeldt
Swerea
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
M. Wieser
The Swedish Institute of Space Physics
S. Barabash
The Swedish Institute of Space Physics
M. Emanuelsson
The Swedish Institute of Space Physics
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
1084-6999 (ISSN)
597-600978-142449632-7 (ISBN)
Areas of Advance
Transport
Production
Subject Categories
Physical Sciences
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/MEMSYS.2011.5734495
ISBN
978-142449632-7