Microshutters for MEMS-based time-of-flight measurements in space
Paper i proceeding, 2011

This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-of-flight (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.

Författare

K. Brinkfeldt

Swerea IVF AB

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial och system

M. Wieser

Instiutet for rymdfysik

S. Barabash

Instiutet for rymdfysik

M. Emanuelsson

Instiutet for rymdfysik

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999 (ISSN)

597-600

Styrkeområden

Transport

Produktion

Ämneskategorier

Fysik

Elektroteknik och elektronik

DOI

10.1109/MEMSYS.2011.5734495

ISBN

978-142449632-7

Mer information

Senast uppdaterat

2018-02-28