Vibration Modes of a Resonant Silicon Tube Density Sensor
Journal article, 1996

Author

Peter Enoksson

Department of Microelectronics

Göran Stemme

Erik Stemme

IEEE/ASME Journal of Microelectromechanical Systems, Vol.5, No. 1

39-43

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

More information

Created

10/7/2017