A valve-less planar pump isotropically etched in silicon
Journal article, 1996
Author
Anders Olsson
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
Journal of Micromechanics and Microengineering, Vol. 6, No. 1
87-91
Areas of Advance
Transport
Production
Life Science Engineering (2010-2018)
Subject Categories
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering