A Silicon Resonant Sensor Structure for Coriolis Mass Flow Measurements
Journal article, 1997
Author
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
IEEE/ASME Journal of Microelectromechanical Systems, Vol. 6, No. 2
119-125
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Transport
Production
Energy