Gas Damping of Electrostatically Excited Resonators
Journal article, 1997
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Göran Stemme
Sensors and Actuators A 61
249-255
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Transport
Production