New Structure for Corner Compensation in Anisotropic KOH-etching
Journal article, 1997

Author

Peter Enoksson

Department of Microelectronics

Journal of Micromechanics and Microengineering, 7

141-144

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Production

Materials Science

Subject Categories

Materials Engineering

Other Engineering and Technologies

Other Engineering and Technologies not elsewhere specified

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Roots

Basic sciences

More information

Created

10/6/2017