New Structure for Corner Compensation in Anisotropic KOH-etching
Journal article, 1997
Author
Peter Enoksson
Department of Microelectronics
Journal of Micromechanics and Microengineering, 7
141-144
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Production
Materials Science
Subject Categories (SSIF 2011)
Materials Engineering
Other Engineering and Technologies
Other Engineering and Technologies not elsewhere specified
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Roots
Basic sciences