New Structure for Corner Compensation in Anisotropic KOH-etching
Journal article, 1997
Author
Peter Enoksson
Department of Microelectronics
Journal of Micromechanics and Microengineering, 7
141-144
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Production
Materials Science
Subject Categories
Materials Engineering
Other Engineering and Technologies
Other Engineering and Technologies not elsewhere specified
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Roots
Basic sciences