Low pressure encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection
Journal article, 1998
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Göran Stemme
Sensors and Actuators A66
160-166
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Production
Driving Forces
Innovation and entrepreneurship