Low pressure encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection
Journal article, 1998

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Göran Stemme

Sensors and Actuators A66

160-166

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Production

Driving Forces

Innovation and entrepreneurship

More information

Created

10/6/2017